Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4890245 | Method for measuring temperature of semiconductor substrate and apparatus therefor | Makoto Uehara, Hajime Ichikawa, Shigeru Kato | 1989-12-26 |
| 4859832 | Light radiation apparatus | Makoto Uehara, Hajime Ichikawa, Shigeru Kato | 1989-08-22 |