Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4858975 | Vacuum chuck apparatus for wet processing wafers | — | 1989-08-22 |
| 4803884 | Method for measuring lattice defects in semiconductor | Hiroshi Kaneta, Haruhisa Mori, Kunihiko Wada | 1989-02-14 |