Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4889820 | Method of producing a semiconductor device | — | 1989-12-26 |
| 4806769 | Disk exchangeable target mechanism with effective cooling means, for ion implantation system | Motoo Nakano | 1989-02-21 |
| 4803884 | Method for measuring lattice defects in semiconductor | Hiroshi Kaneta, Tsutomu Ogawa, Kunihiko Wada | 1989-02-14 |