Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4841191 | Piezoelectric actuator control apparatus | Keiji Takada, Satoru Fukuhara, Toshiyuki Morimura, Sumio Hosaka, Shigeyuki Hosoki | 1989-06-20 |
| 4829444 | Charged particle beam lithography system | Norio Saitou, Tsutomu Komoda, Mitsuo Ooyama | 1989-05-09 |
| 4808829 | Mark position detection system for use in charged particle beam apparatus | Takashi Matsuzaka, Genya Matsuoka, Kazumi Iwadate, Tadahito Matsuda, Ryoichi Yamaguchi | 1989-02-28 |