Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4808829 | Mark position detection system for use in charged particle beam apparatus | Masahide Okumura, Genya Matsuoka, Kazumi Iwadate, Tadahito Matsuda, Ryoichi Yamaguchi | 1989-02-28 |