Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4820609 | Highly sensitive positive resist mixture | Katsuhiro Harada | 1989-04-11 |
| 4808829 | Mark position detection system for use in charged particle beam apparatus | Masahide Okumura, Takashi Matsuzaka, Genya Matsuoka, Tadahito Matsuda, Ryoichi Yamaguchi | 1989-02-28 |