Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4829444 | Charged particle beam lithography system | Norio Saitou, Masahide Okumura, Tsutomu Komoda | 1989-05-09 |
| 4820928 | Lithography apparatus | Kimiaki Ando, Yoshio Kawamura, Norio Saitou, Takanori Simura, Hiroyuki Kohida | 1989-04-11 |