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Word line contact structure for three-dimensional memory devices and fabrication methods thereof |
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Wafer flatness control using backside compensation structure |
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Staircase structure for memory device |
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2020-05-19 |
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2020-05-05 |
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Staircase etch control in forming three-dimensional memory device |
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Method for forming dual-deck channel hole structure of three-dimensional memory device |
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2019-12-24 |