Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11779871 | Exhaust module for wafer baking apparatus and wafer processing system having the same | Jong-Kill Lim, Sungkun Jang | 2023-10-10 |
| 11693307 | Reticle pod for preventing haze contamination and reticle stocker having the same | Jiyong Yoo, Dae-Youp Lee | 2023-07-04 |
| 11605550 | Alignment system | Siwon Yang, Jiyong Yoo | 2023-03-14 |
| 11342184 | Method of forming multiple patterned layers on wafer and exposure apparatus thereof | BUM-HWAN JEON, Soo-Hyoung Kim, Siwon Yang, Kihyung Lee | 2022-05-24 |
| 11340523 | Correction method of photomask pattern | Siwon Yang, Jiyong Yoo | 2022-05-24 |
| 11079690 | Apparatus and method for processing a substrate using the same | Hyun-Suk Yang, Soo-Hyoung Kim, Sung-Uk Kim | 2021-08-03 |
| 5844672 | Method for comparing lens distortion between two steppers | — | 1998-12-01 |
| 5804514 | Method of planarizing a film of a semiconductor device | — | 1998-09-08 |