Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11779871 | Exhaust module for wafer baking apparatus and wafer processing system having the same | BYUNG-IN KWON, Sungkun Jang | 2023-10-10 |
| 11581187 | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same | Jiyong Yoo, Sungkun Jang | 2023-02-14 |
| 10854484 | Method and system for managing liquid supply | Jae Sik KIM, Sungkun Jang | 2020-12-01 |
| 7377776 | Semiconductor wafer baking apparatus | Jin-Sung Lee, Dong Woo Lee, Tae Gyu Kim, Tae Sang Park, Bang-weon Lee +2 more | 2008-05-27 |
| 7115840 | Wafer bake apparatus | Dong Woo Lee, Jin-Sung Lee, Bang-weon Lee, Tae Sang Park, Tae Gyu Kim | 2006-10-03 |
| 6816230 | Exposure control apparatus in a lithography system and method thereof | — | 2004-11-09 |