Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342184 | Method of forming multiple patterned layers on wafer and exposure apparatus thereof | Soo-Hyoung Kim, Siwon Yang, Kihyung Lee, BYUNG-IN KWON | 2022-05-24 |
| 10948835 | Method of leveling wafer in exposure process and exposure system thereof | — | 2021-03-16 |