Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525315 | Sensor system for tong assembly | Martin Helms | 2022-12-13 |
| 11486210 | Apparatus and methods for determining operational mode of tong assembly | Heidi N. Cline, Frank Wern | 2022-11-01 |
| 11078733 | Apparatus and methods for determining operational mode of tong assembly | Heidi N. Cline, Frank Wern | 2021-08-03 |
| 10995569 | Sensor system for tong assembly | Martin Helms | 2021-05-04 |
| 10337264 | Movable tong assembly | Georg Zimbelmann, Bjoern Thiemann, Martin Liess | 2019-07-02 |
| 8275478 | Method and apparatus for routing wafer pods to allow parallel processing | Diwaskar Adhikari, Raymond G. Goss, Carmen Adriana Maxim | 2012-09-25 |
| 8047762 | Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools | Olaf Zimmerhackl, Alfred Honold | 2011-11-01 |
| 7974726 | Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier | Konrad Rosenbaum | 2011-07-05 |