Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7974726 | Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier | Jan Rothe | 2011-07-05 | $9,363,000 |