Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218994 | Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same | Olaf Zimmerhackl | 2015-12-22 |
| 8047762 | Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools | Olaf Zimmerhackl, Jan Rothe | 2011-11-01 |