Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297534 | Process for the generation of metal- or semimetal-containing films | Sinja Verena Klenk, Alexander Georg Hufnagel, Hagen Wilmer, Daniel Loffler, Sabine Weiguny +2 more | 2025-05-13 |
| 12084464 | Rhenium complexes and methods of use | Thomas Knisley, Keenan N. Woods, Mark Saly, Stefan Cwik | 2024-09-10 |
| 12027488 | Methods of forming stacked integrated circuits using selective thermal atomic layer deposition on conductive contacts and structures formed using the same | Mike Breeden, Victor Wang, Andrew C. Kummel, Ming Li, Muhannad Bakir +2 more | 2024-07-02 |
| 11655262 | Process for the generation of metal-containing films | David Dominique Schweinfurth, Lukas Mayr, Sinja Verena Klenk, Sabine Weiguny, Kyle Blakeney +2 more | 2023-05-23 |
| 11532474 | Deposition of rhenium-containing thin films | Thomas Knisley, Keenan N. Woods, Mark Saly, Stefan Cwik | 2022-12-20 |
| 11505562 | Process for the generation of metal-containing films | Lukas Mayr, David Dominique Schweinfurth, Daniel Waldmann, Kyle Blakeney, Sinja Verena Klenk +3 more | 2022-11-22 |
| 11408068 | Deposition of tellurium-containing thin films | Thomas Knisley, Keenan N. Woods, Mark Saly, Apoorva Upadhyay | 2022-08-09 |
| 11377454 | Aluminum precursor and process for the generation of metal-containing films | Kyle Blakeney, Lukas Mayr, David Dominique Schweinfurth, Sabine Weiguny, Daniel Waldmann | 2022-07-05 |
| 11319332 | Process for the generation of metal-containing films | David Dominique Schweinfurth, Lukas Mayr, Sinja Verena Klenk, Sabine Weiguny, Kyle Blakeney +2 more | 2022-05-03 |
| 11015241 | Reaction of diazadiene complexes with amines | Marissa Marie KERRIGAN | 2021-05-25 |
| 10982336 | Method for etching a metal surface | — | 2021-04-20 |
| 10711346 | 6-membered cyclic dienes as strongly reducing precursors for the growth of element films by vapor phase deposition | — | 2020-07-14 |
| 10533023 | Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate | Joseph Peter Klesko | 2020-01-14 |
| 9982344 | Thermally stable volatile precursors | Thomas Knisley | 2018-05-29 |
| 9822446 | Thermally stable volatile precursors | Thomas Knisley | 2017-11-21 |
| 9758866 | Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films | Lakmal C. Kalutarage | 2017-09-12 |
| 9714464 | Precursors for atomic layer deposition | Lakmal C. Kalutarage | 2017-07-25 |
| 9540730 | Deposition of metal films based upon complementary reactions | — | 2017-01-10 |
| 9255327 | Thermally stable volatile precursors | Thomas Knisley | 2016-02-09 |
| 9249505 | Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate | Joseph Peter Klesko | 2016-02-02 |
| 9157149 | Bis(trimethylsilyl) six-membered ring systems and related compounds as reducing agents for forming layers on a substrate | Joseph Peter Klesko | 2015-10-13 |
| 8962876 | Thermally stable volatile film precursors | Thomas Knisley, Panditha Koralalage Don Mahesh Chinthaka Karunarathne | 2015-02-24 |
| 8907115 | Synthesis and characterization of first row transition metal complexes containing α-keto hydrazonate ligands as potential precursors for use in metal film deposition | Lakmal C. Kalutarage | 2014-12-09 |
| 8148564 | Compounds for forming metal nitrides | — | 2012-04-03 |
| 7901656 | Metal oxide-containing nanoparticles | Charles Dezelah | 2011-03-08 |