Issued Patents All Time
Showing 25 most recent of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7816152 | In situ, ex situ and inline process monitoring, optimization and fabrication | Kitaek Kang | 2010-10-19 |
| 7718554 | Focused laser beam processing | Kitaek Kang | 2010-05-18 |
| 7599048 | Optical emission spectroscopy process monitoring and material characterization | Kitaek Kang | 2009-10-06 |
| 7564547 | Spectroscopy system | — | 2009-07-21 |
| 7507667 | Selective heating using flash anneal | — | 2009-03-24 |
| 7440094 | Optical sample characterization system | — | 2008-10-21 |
| 7397561 | Spectroscopy system | — | 2008-07-08 |
| 7362426 | Raman and photoluminescence spectroscopy | — | 2008-04-22 |
| 7358200 | Gas-assisted rapid thermal processing | — | 2008-04-15 |
| 7344979 | High pressure treatment for improved grain growth and void reduction | Kitaek Kang | 2008-03-18 |
| 7276457 | Selective heating using flash anneal | — | 2007-10-02 |
| 7262918 | Light beam conditioner | Kitaek Kang | 2007-08-28 |
| 7198677 | Low temperature wafer backside cleaning | — | 2007-04-03 |
| 7194199 | Stacked annealing system | — | 2007-03-20 |
| 7141513 | Integrated ashing and implant annealing method using ozone | — | 2006-11-28 |
| 7063583 | Multi-spectral uniform light source | — | 2006-06-20 |
| 6952889 | Forced convection assisted rapid thermal furnace | — | 2005-10-11 |
| 6932561 | Power generation system | — | 2005-08-23 |
| 6911376 | Selective heating using flash anneal | — | 2005-06-28 |
| 6897162 | Integrated ashing and implant annealing method | — | 2005-05-24 |
| 6887803 | Gas-assisted rapid thermal processing | — | 2005-05-03 |
| 6879778 | Batch furnace | Takashi Fukada | 2005-04-12 |
| 6862404 | Focused photon energy heating chamber | — | 2005-03-01 |
| 6809035 | Hot plate annealing | — | 2004-10-26 |
| 6790475 | Source gas delivery | — | 2004-09-14 |