Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10655244 | GaN substrate, method for producing GaN substrate, method for producing GaN crystal, and method for manufacturing semiconductor device | Yusuke Tsukada, Satoru Nagao, Kazunori Kamada, Masayuki Tashiro, Kenji Fujito +3 more | 2020-05-19 |
| 10066319 | GaN substrate, method for producing GaN substrate, method for producing GaN crystal, and method for manufacturing semiconductor device | Yusuke Tsukada, Satoru Nagao, Kazunori Kamada, Masayuki Tashiro, Kenji Fujito +3 more | 2018-09-04 |
| 6879778 | Batch furnace | Woo Sik Yoo | 2005-04-12 |
| 5753564 | Method for forming a thin film of a silicon oxide on a silicon substrate, by BCR plasma | — | 1998-05-19 |