Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677765 | Method for calibrating a topographic instrument | Ellen Laird, W. Murray Bullis, Bradley W. Scheer | 1997-10-14 |
| 5599464 | Formation of atomic scale vertical features for topographic instrument calibration | Ellen Laird, W. Murray Bullis, Bradley W. Scheer | 1997-02-04 |
| 5453830 | Spatially isolated diffractor on a calibration substrate for a pellicle inspection system | — | 1995-09-26 |