Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148702 | Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns | Hans-Joachim Doering, Joachim Heinitz, Matthias Slodowski | 2012-04-03 |
| 7601969 | Illumination condenser for a particle optical projection system | Hans-Joachim Doering | 2009-10-13 |
| 7560713 | Correction lens system for a particle beam projection device | Hans-Joachim Doering | 2009-07-14 |
| 7491946 | Electrostatic deflection system for corpuscular radiation | Stefan Risse, Thomas Peschel, Christoph Damm, Andreas Gebhardt, Mathias Rohde +3 more | 2009-02-17 |
| 6600162 | Method and device for exposing a substrate to light | Peter Hahmann, Dirk Beyer, Dorothee Krauhs | 2003-07-29 |
| 6541776 | Device for electrostatic deflection of a particle beam | Hans-Joachim Döring | 2003-04-01 |