Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148702 | Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns | Hans-Joachim Doering, Thomas Elster, Matthias Slodowski | 2012-04-03 |
| 7741620 | Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate | Hans-Joachim Doering | 2010-06-22 |
| 7332730 | Device and method for imaging a multiple particle beam on a substrate | Andreas Schubert | 2008-02-19 |