Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148702 | Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns | Thomas Elster, Joachim Heinitz, Matthias Slodowski | 2012-04-03 |
| 7741620 | Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrate | Joachim Heinitz | 2010-06-22 |
| 7601969 | Illumination condenser for a particle optical projection system | Thomas Elster | 2009-10-13 |
| 7560713 | Correction lens system for a particle beam projection device | Thomas Elster | 2009-07-14 |
| 7491946 | Electrostatic deflection system for corpuscular radiation | Stefan Risse, Thomas Peschel, Christoph Damm, Andreas Gebhardt, Mathias Rohde +3 more | 2009-02-17 |
| 6571874 | Method for the in-situ extraction of gas from coal seams | Armin Lovenich | 2003-06-03 |