Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492625 | Apparatus and method for controlling temperature uniformity of substrates | Alexander I. Gurary, Ameesh Patel, Jeffrey C. Ramer | 2002-12-10 |
| 6398406 | Temperature determination using pyrometry | William G. Breiland, Alexander I. Gurary | 2002-06-04 |
| 6349270 | Method and apparatus for measuring the temperature of objects on a fast moving holder | Alexander I. Gurary, Ameesh Patel, Jeffrey C. Ramer | 2002-02-19 |
| 5840124 | Wafer carrier with flexible wafer flat holder | Alexander I. Gurary, Scott Beherrell | 1998-11-24 |
| 5759281 | CVD reactor for uniform heating with radiant heating filaments | Alexander I. Gurary, Scott Beherrell | 1998-06-02 |