Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5716485 | Electrode designs for controlling uniformity profiles in plasma processing reactors | Siamak Salimian, Lumin Li | 1998-02-10 |
| 5656123 | Dual-frequency capacitively-coupled plasma reactor for materials processing | Siamak Salimian, Lumin Li | 1997-08-12 |