Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413885 | Method for patterning semiconductor devices on a silicon substrate using oxynitride film | Liang-Gi Yao | 2002-07-02 |
| 6372642 | Method for patterning semiconductor devices with a resolution down to 0.12 &mgr;m on a silicon substrate using oxynitride film and deep UV lithography | Liang-Gi Yao | 2002-04-16 |
| 6258734 | Method for patterning semiconductor devices on a silicon substrate using oxynitride film | Liang-Gi Yao | 2001-07-10 |
| 6077756 | Overlay target pattern and algorithm for layer-to-layer overlay metrology for semiconductor processing | Hua-Tai Lin, Gwo-Yuh Shiau | 2000-06-20 |
| 5982044 | Alignment pattern and algorithm for photolithographic alignment marks on semiconductor substrates | Hua-Tai Lin, Gwo-Yuh Shiau | 1999-11-09 |