Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861362 | Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same | Young-Tong Tsai | 2005-03-01 |
| 6211557 | Contact structure using taper contact etching and polycide step | Erik S. Jeng | 2001-04-03 |
| 6069077 | UV resist curing as an indirect means to increase SiN corner selectivity on self-aligned contact etching process | Daniel Lee | 2000-05-30 |
| 5915198 | Contact process using taper contact etching and polycide step | Erik S. Jeng | 1999-06-22 |
| 5854135 | Optimized dry etching procedure, using an oxygen containing ambient, for small diameter contact holes | — | 1998-12-29 |
| 5817579 | Two step plasma etch method for forming self aligned contact | Erik S. Jeng | 1998-10-06 |
| 5788767 | Method for forming single sin layer as passivation film | Liang-Tung Chang | 1998-08-04 |