Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193043 | System for chemical mechanical polishing of Ge-based materials and devices | Chia-Jung Hsu, Neng-Kuo Chen, Song-Yuan Chang, Teng-Chun Tsai | 2021-12-07 |
| 10501660 | Method of selectively removing tungsten over silicon oxide | Chung-Wei Chiang, Song-Yuan Chang, Ming-Hui Lu, Ming-Che Ho | 2019-12-10 |
| 9994736 | Slurry composition for chemical mechanical polishing of GE-based materials and devices | Chia-Jung Hsu, Neng-Kuo Chen, Song-Yuan Chang, Teng-Chun Tsai | 2018-06-12 |
| 9881803 | Chemical mechanical polishing method using slurry composition containing N-oxide compound | Chia-Jung Hsu, Neng-Kuo Chen, Wen-Feng Chueh, Sey-Ping Sun, Song-Yuan Chang | 2018-01-30 |
| 9530655 | Slurry composition for chemical mechanical polishing of Ge-based materials and devices | Chia-Jung Hsu, Neng-Kuo Chen, Song-Yuan Chang, Teng-Chun Tsai | 2016-12-27 |
| 9493678 | Polishing composition | Chun-Chieh Lee, Song-Yuan Chang, Ming-Hui Lu, Ming-Che Ho | 2016-11-15 |
| 9416297 | Chemical mechanical polishing method using slurry composition containing N-oxide compound | Chia-Jung Hsu, Neng-Kuo Chen, Wen-Feng Chueh, Sey-Ping Sun, Song-Yuan Chang | 2016-08-16 |
| 8747693 | Silica having metal ions absorbed thereon and fabricating method thereof | Song-Yuan Chang, Ming-Hui Lu, Chung-Wei Chiang | 2014-06-10 |