Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501660 | Method of selectively removing tungsten over silicon oxide | Yun-Lung Ho, Chung-Wei Chiang, Song-Yuan Chang, Ming-Che Ho | 2019-12-10 |
| 9718991 | Chemical mechanical polishing slurry | Yi Yang, Wen-Cheng Liu, Ming-Che Ho, Song-Yuan Chang | 2017-08-01 |
| 9493678 | Polishing composition | Yun-Lung Ho, Chun-Chieh Lee, Song-Yuan Chang, Ming-Che Ho | 2016-11-15 |
| 9165760 | Cleaning composition and cleaning method using the same | Yu-Chi Fu, Wen-Tsai Tsai, Song-Yuan Chang | 2015-10-20 |
| 9039925 | Polishing slurry composition | Wei Chen, Wen-Tsai Tsai, Ho-Ying Wu, Song-Yuan Chang | 2015-05-26 |
| 8901001 | Slurry composition and method of fabricating damascene structure using the same | Song-Yuan Chang, Wen-Tsai Tsai, Po-Yuan Shen | 2014-12-02 |
| 8747693 | Silica having metal ions absorbed thereon and fabricating method thereof | Yun-Lung Ho, Song-Yuan Chang, Chung-Wei Chiang | 2014-06-10 |
| 8641920 | Polishing composition for planarizing metal layer | Song-Yuan Chang, Ming-Che Ho | 2014-02-04 |
| 7763577 | Acidic post-CMP cleaning composition | Song-Yuan Chang, Wen-Jsai Jsai, Po-Yuan Shen | 2010-07-27 |