Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216072 | Reticle thermal expansion calibration method capable of improving sub-recipe | Yuan-Chi Pai, Wen Yi Tan | 2025-02-04 |
| 12204247 | Lithography film stack and lithography method | Ching-Shu Lo, Yuan-Chi Pai, Wen Yi Tan | 2025-01-21 |
| 11692946 | Method for aligning to a pattern on a wafer | Dian Han Liu, Yuan-Chi Pai, Wen Yi Tan | 2023-07-04 |