Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12204247 | Lithography film stack and lithography method | Yuan-Chi Pai, Maohua Ren, Wen Yi Tan | 2025-01-21 |
| 12020932 | Photoresist coating method | Shi Teng Zhong, Yuan-Chi Pai, Wen Yi Tan | 2024-06-25 |
| 9256120 | Method of performing optical proximity correction for preparing mask projected onto wafer by photolithography | Jie Zhao, Chia-Ping Chen | 2016-02-09 |
| 9147033 | Method of making photomask layout and method of forming photomask including the photomask layout | Jie Zhao, Chia-Ping Chen, Hua-Biao Wu | 2015-09-29 |
| 8938697 | Method of performing optical proximity correction for preparing mask projected onto wafer by photolithography | Jie Zhao, Chia-Ping Chen | 2015-01-20 |
| 8233142 | Monitoring method of exposure apparatus | Da Jiang | 2012-07-31 |