| 9984974 |
Method for fabricating semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Yi-Hui Lee +1 more |
2018-05-29 |
| 9899322 |
Method for fabricating semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Yi-Hui Lee +1 more |
2018-02-20 |
| 9564371 |
Method for forming semiconductor device |
Ching-Wen Hung, Jia-Rong Wu, Ching-Ling Lin, Yi-Hui Lee, Chih-Sen Huang +1 more |
2017-02-07 |
| 9466521 |
Semiconductor device having a patterned metal layer embedded in an interlayer dielectric layer |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Yi-Hui Lee +1 more |
2016-10-11 |
| 9324610 |
Method for fabricating semiconductor device |
Ching-Wen Hung, Jia-Rong Wu, Ching-Ling Lin, Yi-Hui Lee, Chih-Sen Huang +2 more |
2016-04-26 |
| 9318571 |
Gate structure and method for trimming spacers |
I-Chang Wang, Ming-Tsung Chen, Ling-Chun Chou, Po-Chao Tsao, Hui-Ling Chen +3 more |
2016-04-19 |
| 9312121 |
Method for cleaning contact hole and forming contact plug therein |
Yi-Hui Lee, Ching-Wen Hung, Jia-Rong Wu, Ching-Ling Lin, Chih-Sen Huang +4 more |
2016-04-12 |
| 9263392 |
Semiconductor device and method for fabricating the same |
Ching-Ling Lin, Chih-Sen Huang, Ching-Wen Hung, Jia-Rong Wu, Yi-Hui Lee +1 more |
2016-02-16 |
| 9105651 |
Method of fabricating a MOS device using a stress-generating material |
Yi-Wei Chen, I-Fang Huang |
2015-08-11 |
| 8841193 |
Semiconductor structure and method for slimming spacer |
Ted Ming-Lang Guo, Chin-Cheng Chien, Shu-Yen Chan, Ling-Chun Chou, Chun-Yuan Wu |
2014-09-23 |
| 8502288 |
Semiconductor structure and method for slimming spacer |
Ted Ming-Lang Guo, Chin-Cheng Chien, Shu-Yen Chan, Ling-Chun Chou, Chun-Yuan Wu |
2013-08-06 |