Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6334581 | Nozzle reposition device used in a resist coating process | Hsi-Huang Lee, Hsien-Jung Hsu, Ching-Chih Cheng | 2002-01-01 |
| 6170512 | Flow control device | Kuo-Feng Huang, Ming-Che Yang, Hung-Lung Mar | 2001-01-09 |
| 6099646 | Dispensing system of a coater | Ming-Che Yang, Kuo-Feng Huang, En-Tien Tan | 2000-08-08 |
| 6076569 | Cup rinse with a valvular ring | Hung-Lung Ma, Hsien-Jung Hsu, Kuo-Chen Wang | 2000-06-20 |
| 5937876 | Rinsing system used in a photoresist coater with capability to avoid a reversed pressure effect | Ching-Chih Cheng, Hung-Lung Ma | 1999-08-17 |