Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6334581 | Nozzle reposition device used in a resist coating process | Kuei-Hsi Lai, Hsien-Jung Hsu, Ching-Chih Cheng | 2002-01-01 |
| 5740580 | Stepper vacuum chuck wiper | Chung-Chien Leu, En-Tien Tan | 1998-04-21 |