CC

Ching-Chih Cheng

UM United Microelectronics: 5 patents #1,074 of 4,560Top 25%
Overall (All Time): #1,043,187 of 4,157,543Top 30%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6334581 Nozzle reposition device used in a resist coating process Kuei-Hsi Lai, Hsi-Huang Lee, Hsien-Jung Hsu 2002-01-01
6295683 Equipment for brushing the underside of a semiconductor wafer Kuei-Si Lai, Shih-Hsun Chiou, Kuo-Feng Huang 2001-10-02
6177874 Liquid supplying device for providing chemical solution with a liquid level sensor Wen-Liang Fang, Kuo-Feng Huang, Hung-Lung Ma 2001-01-23
6048399 SOG coater nozzle pot En-Tien Tan, Ming-Che Yang, Kuo-Feng Huang 2000-04-11
5937876 Rinsing system used in a photoresist coater with capability to avoid a reversed pressure effect Kuei-Hsi Lai, Hung-Lung Ma 1999-08-17