Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6027996 | Method of planarizing a pre-metal dielectric layer using chemical-mechanical polishing | Water Lur, Shih-Wei Sun | 2000-02-22 |
| 5885894 | Method of planarizing an inter-layer dielectric layer | Water Lur, Shih-Wei Sun | 1999-03-23 |