Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910192 | Ion source, ion implantation apparatus, and ion source operating method | Akio Higashi, Toshihiro Terasawa | 2021-02-02 |
| 10529532 | Ion source and ion implantation apparatus | Takumi YUZE, Toshihiro Terasawa | 2020-01-07 |
| 8356575 | Ion source and plasma processing apparatus | Saburou Shimizu, Toshiju Kunibe | 2013-01-22 |