SS

Saburou Shimizu

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #3,144,133 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8356575 Ion source and plasma processing apparatus Naruyasu Sasaki, Toshiju Kunibe 2013-01-22