Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910192 | Ion source, ion implantation apparatus, and ion source operating method | Akio Higashi, Naruyasu Sasaki | 2021-02-02 |
| 10529532 | Ion source and ion implantation apparatus | Takumi YUZE, Naruyasu Sasaki | 2020-01-07 |
| 5980212 | Anode-cathode structure for ion pump having specifically determined dimensions | Guo Hua Shen, Nozomu Takagi, Tsuyoshi Kotani, Hiroyuki Kinpara, Katsuji Nakajima +1 more | 1999-11-09 |