Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011315 | Thin film forming apparatus | Takafumi Matsumoto, Shun Mikami, Mineharu Moriya, Hideyuki Odagi, Tetsuya Shimada +2 more | 2011-09-06 |
| 7927472 | Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus | Haruo Takahashi, Takafumi Matsumoto | 2011-04-19 |
| 7247345 | Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof | Haruo Takahashi, Takafumi Matsumoto | 2007-07-24 |
| 7033461 | Thin film forming apparatus and method | Noriaki Tani, Toshihiro Suzuki, Satoshi Ikeda, Hiroaki Kawamura, Satoru Ishibashi +1 more | 2006-04-25 |