SM

Shun Mikami

UL Ulvac: 1 patents #339 of 680Top 50%
Overall (All Time): #3,261,787 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8011315 Thin film forming apparatus Takafumi Matsumoto, Kouichi Hanzawa, Mineharu Moriya, Hideyuki Odagi, Tetsuya Shimada +2 more 2011-09-06