Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Ganesh Sundaram, Jill S. Becker, Mark J. Dalberth | 2017-10-10 |
| 9777371 | ALD systems and methods | Jill S. Becker, Ganesh Sundaram, Eric W. Deguns | 2017-10-03 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Ganesh Sundaram, Jill S. Becker, Mark J. Dalberth | 2017-02-14 |
| 9328417 | System and method for thin film deposition | Jill S. Becker, Douwe Johannes Monsma | 2016-05-03 |
| 9175388 | Reaction chamber with removable liner | Jill S. Becker, Douwe Johannes Monsma | 2015-11-03 |
| 5984267 | Apparatus for isolating and containing reactive medium | — | 1999-11-16 |
| 5738335 | Apparatus for isolating and containing reactive medium | — | 1998-04-14 |