Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905414 | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Roy G. Gordon, Dennis M. Hausmann, Seigi Suh | 2018-02-27 |
| 9783888 | Atomic layer deposition head | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Mark J. Dalberth | 2017-10-10 |
| 9777371 | ALD systems and methods | Roger R. Coutu, Ganesh Sundaram, Eric W. Deguns | 2017-10-03 |
| 9567670 | Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range | Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Mark J. Dalberth | 2017-02-14 |
| 9556519 | Vapor deposition systems and methods | Douwe Johannes Monsma | 2017-01-31 |
| 9328417 | System and method for thin film deposition | Roger R. Coutu, Douwe Johannes Monsma | 2016-05-03 |
| 9175388 | Reaction chamber with removable liner | Roger R. Coutu, Douwe Johannes Monsma | 2015-11-03 |
| 8536070 | Vapor deposition of silicon dioxide nanolaminates | Roy G. Gordon, Dennis M. Hausmann | 2013-09-17 |
| 8334016 | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Roy G. Gordon, Dennis M. Hausmann, Seigi Suh | 2012-12-18 |
| 8202575 | Vapor deposition systems and methods | Douwe Johannes Monsma | 2012-06-19 |
| 8008743 | Vapor deposition of silicon dioxide nanolaminates | Roy G. Gordon, Dennis M. Hausmann | 2011-08-30 |
| 7560581 | Vapor deposition of tungsten nitride | Roy G. Gordon, Seigi Suh | 2009-07-14 |
| 7507848 | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Roy G. Gordon, Dennis M. Hausmann, Seigi Suh | 2009-03-24 |
| 6969539 | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide | Roy G. Gordon, Dennis M. Hausmann, Seigi Suh | 2005-11-29 |