Mark J. Dalberth — 3 Patents at Ultratech

Mark J. Dalberth has been granted 3 US patents while listed as an inventor at Ultratech. The first was granted in 2004 and the most recent in October 2017. Mark J. Dalberth ranks #1,328,092 of 4,157,543 US inventors in our database (top 31.9%). Patent records list Mark J. Dalberth in Somerville, MA, US.

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9783888	Atomic layer deposition head	Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Jill S. Becker	2017-10-10
9567670	Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter range	Michael J. Sershen, Ganesh Sundaram, Roger R. Coutu, Jill S. Becker	2017-02-14	$4,300,000
6679946	Method and apparatus for controlling substrate temperature and layer thickness during film formation	Andrew William Jackson	2004-01-20	$3,400,000

Mark J. Dalberth — 3 Patents

Issued Patents All Time

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