Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12007693 | Laser focussing module | Ruud Antonius Catharina Maria Beerens, Nico Johannes Antonius Hubertus Boonen, Stefan Michael Bruno Bäumer, Tolga Ergin, Andreas Hopf +7 more | 2024-06-11 |
| 11968767 | EUV light source with a separation device | Oliver Schlosser | 2024-04-23 |
| 10574024 | Optical module, laser amplifier system, method and use | Benjamin Dannecker, Jan-Philipp Negel, André Loescher | 2020-02-25 |
| 10488250 | Method and device for quantitatively sensing the power fraction of a radiation background of a pulsed laser | Benjamin Dannecker, Jan-Philipp Negel | 2019-11-26 |