Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541729 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2003-04-01 |
| 6498381 | Semiconductor structures having multiple conductive layers in an opening, and methods for fabricating same | Patrick B. Halahan | 2002-12-24 |
| 6498074 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Patrick B. Halahan, Sergey Savastiouk | 2002-12-24 |
| 6462300 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2002-10-08 |
| 6448188 | Method of preventing motion of article in an article holder | Alex Berger | 2002-09-10 |
| 6448153 | Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners | Patrick B. Halahan, Sergey Savastiouk | 2002-09-10 |
| 6423923 | Monitoring and controlling separate plasma jets to achieve desired properties in a combined stream | — | 2002-07-23 |
| 6420209 | Integrated circuits and methods for their fabrication | — | 2002-07-16 |
| 6402843 | Non-contact workpiece holder | Sergey Savastiouk, Alex Berger, Igor Bagriy | 2002-06-11 |
| 6398823 | Dynamic break for non-contact wafer holder | Alex Berger | 2002-06-04 |
| 6322903 | Package of integrated circuits and vertical integration | Sergey Savastiouk | 2001-11-27 |
| 6323134 | Plasma processing methods and apparatus | — | 2001-11-27 |
| 6287976 | Plasma processing methods and apparatus | Igor Bagriy | 2001-09-11 |
| 6261375 | Plasma processing methods and apparatus | Igor Bagriy | 2001-07-17 |
| 6238587 | Method for treating articles with a plasma jet | Iskander Tokmouline | 2001-05-29 |
| 6203661 | Brim and gas escape for non-contact wafer holder | Sergey Savastiouk, Alex Berger | 2001-03-20 |
| 6184060 | Integrated circuits and methods for their fabrication | — | 2001-02-06 |
| 6168697 | Holders suitable to hold articles during processing and article processing methods | Steven Kaufman | 2001-01-02 |
| 6139678 | Plasma processing methods and apparatus | — | 2000-10-31 |
| 6121571 | Plasma generator ignition circuit | Patrick B. Halahan | 2000-09-19 |
| 6105534 | Apparatus for plasma jet treatment of substrates | Iskander Tokmouline | 2000-08-22 |
| 6099056 | Non-contact holder for wafer-like articles | George N. Steinberg | 2000-08-08 |
| 6095582 | Article holders and holding methods | John Anthony Jacques | 2000-08-01 |
| 6040548 | Apparatus for generating and deflecting a plasma jet | — | 2000-03-21 |
| 5767627 | Plasma generation and plasma processing of materials | — | 1998-06-16 |