Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410868 | Electrostatic chuck | Masaki Sato, Shuichiro Saigan, Jun Shiraishi, Yutaka MOMIYAMA, Kouta KOBAYASHI | 2022-08-09 |
| 11018039 | Electrostatic chuck which reduces arc discharge | Kosuke Yamaguchi, Jun Shiraishi, Yutaka MOMIYAMA, Shuichiro Saigan | 2021-05-25 |
| 10923383 | Electrostatic chuck | Takara Katayama, Kosuke Yamaguchi, Yutaka MOMIYAMA, Jun Shiraishi, Shuichiro Saigan | 2021-02-16 |
| 10497600 | Electrostatic chuck | Kosuke Yamaguchi, Jun Shiraishi, Yutaka MOMIYAMA, Shuichiro Saigan | 2019-12-03 |
| 8848335 | Electrostatic chuck | Hiroaki Hori, Kazuki Anada | 2014-09-30 |
| 7760484 | Electrostatic chuck | Syouichiro Himuro | 2010-07-20 |
| 7672111 | Electrostatic chuck and method for manufacturing same | Jun Miyaji, Shoichiro Himuro | 2010-03-02 |
| 7468880 | Electrostatic chuck | Syouichiro Himuro | 2008-12-23 |