Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410868 | Electrostatic chuck | Masaki Sato, Ikuo Itakura, Shuichiro Saigan, Jun Shiraishi, Yutaka MOMIYAMA | 2022-08-09 |
| 6977506 | Method of analyzing gas using quartz oscillator and apparatus therefor | Kazutoshi Noda, Ryuichi Naganawa, Kunitoshi Matsunobu, Katsuhide Uchida | 2005-12-20 |