Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7672111 | Electrostatic chuck and method for manufacturing same | Jun Miyaji, Ikuo Itakura | 2010-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7672111 | Electrostatic chuck and method for manufacturing same | Jun Miyaji, Ikuo Itakura | 2010-03-02 |