Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6180313 | Poly (disulfonyl diazomethane) compound and positive-working chemical-amplification photoresist composition containing the same | Hiroto Yukawa, Waki Ohkubo | 2001-01-30 |
| 6153733 | (Disulfonyl diazomethane compounds) | Hiroto Yukawa, Waki Ohkubo, Toshiharu Shimamaki, Kei Mori | 2000-11-28 |