Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7729873 | Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology | Wei Liu, Shifang Li | 2010-06-01 |
| 7627392 | Automated process control using parameters determined with approximation and fine diffraction models | Wei Liu, Shifang Li, Manuel Madriaga | 2009-12-01 |