Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636960 | Apparatus for detecting and aligning a substrate | Shoichi Abe, Kiyotaka Akiyama, Tsutomu Satoyoshi | 1997-06-10 |
| 5558482 | Multi-chamber system | Shoichi Abe, Kiyotaka Akiyama | 1996-09-24 |
| 5509771 | Vacuum processing apparatus | — | 1996-04-23 |
| 5306380 | Vacuum processing apparatus | — | 1994-04-26 |